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MSV-5000 Series Microspectrophotometer

MSV-5700

The MSV-5500 / 5700/5800 is a spectrophotometric photometer capable of measuring spectral transmittance and spectral reflectance at a minimum of 10 µmΦ. The use of a Cassegrain mirror realizes chromatic aberration-free measurement over a wide wavelength range, and the double-beam optical system provides excellent photometric stability. In addition, it can be used for a wide range of applications, such as the standard installation of a polarization measurement function, accessories such as an automatic stage and an integrating sphere unit, and a sharing holder that enables sharing of measurement position information with infrared microscopes and Raman microscopes. Is possible.

Three models with different wavelength regions are available.

  • MSV-5500: Standard model for UV-visible range
  • MSV-5700: Longest wavelength range compatible model in the series
  • MSV-5800: High-sensitivity measurement model in the near-infrared region
MSV-5500

Transmission / reflection measurement in the ultraviolet-visible near-infrared region is possible with a minimum of 10 µmΦ

It can be applied to a wide range of fields such as evaluation of industrial products such as semiconductor devices and optical elements and research and development of functional materials.

range_of_measurement

Observation image

reflectance

Reflectance spectrum of natural oxide film of Si

Basic performance comparable to high-performance spectrophotometers

A pre-spectroscopy method is used in which the light separated by a monochromator is collected and incident on the sample. Spectroscopic measurements with high linearity and wavelength accuracy are possible even in minute areas.

High linearity

By adopting the pre-spectroscopic method, a highly linear calibration curve can be obtained, and quantitative discussion is possible even with microspectroscopy. In addition, the dark correction function enables accurate measurement of samples with strong absorption. Absorption of 526 nm of potassium permanganate aqueous solution gave a highly linear calibration curve up to about 4 Abs.

kmno4spectra
calibration

Absorption spectrum and calibration curve of potassium permanganate aqueous solution

High wavelength resolution and wavelength accuracy

A Zellny Turner-mounted monochromator is used to obtain highly accurate data for samples with large changes in absorbance in a narrow wavelength region such as optical filters, and for measuring sharp peaks. The absorption spectrum of a gas with continuous sharp peaks can also be measured with high resolution with a spectral bandwidth of 0.1 nm.

benzenespectrum

Absorption spectrum of benzene gas

Excellent photometric stability due to double beam optics

By monitoring the reference light during measurement, fluctuations in the metered value can be kept low. Stable measurement is possible even for long-term measurement such as spectrum mapping measurement.

doublebeam

Time variation of photometric values ​​at 200 nm

Large sample room that is easy to operate

Samples can be set smoothly in the large and easy-to-see sample room. In addition, it is equipped with a sliding light-shielding door, allowing measurement without being affected by external light.

size
usability

Observation function that supports accurate measurement point setting

You can check clear observation images on the monitor of your PC through the high-resolution camera built into the microscope. In addition, since the measurement light can be observed in combination with the ATOS mechanism unique to JASCO, accurate measurement position data can be obtained.

Observation of measurement position by ATOS mechanism

By forming an optical image of the photometric aperture on the sample image (ATOS light: Aperture Through Optical System), it is possible to clearly see which part of the sample is being measured. You can surely aim at the measurement point by checking it together with the image of the incident light.

atos

Polarization observation

I observed a stack of resin tapes. Although it is a colorless and transparent tape, the difference in polarization state is clearly shown as a color by observing the polarization.

polarized_before

Normal observation

polarized_after

Polarization observation

4-hole electric revolver

You can attach up to four Cassegrain objectives or objective lenses. By adding a Cassegrain mirror or lens with a different magnification, you can observe at different magnifications and accurately determine the measurement point.

cassegrain_mirror_2

Analysis program that visualizes the desired information

Measurement data of 1-point, multi-point, and mapping measurement modes can be analyzed. In addition to data processing functions such as peak detection and peak height calculation, color calculation and film thickness calculation are included as standard. The analysis result of the mapping measurement data using the automatic stage can be displayed as a color 3D diagram, 3D diagram, contour diagram, color-coded diagram, etc. with a simple operation, and can be analyzed and saved as a single spectrum.

analysis_program

Microscopic spectrum analysis program

analysis_program_2

The measurement spectrum and observation image are displayed, and peak detection and peak height are calculated.

Film thickness calculation

analysis_2

This is a program that calculates the film thickness from the interference waves derived from the sample.

Multilayer membrane analysis program

multilayer

More advanced analysis such as film thickness analysis of multilayer films and calculation of wavelength dispersion of optical constants (n, K) can be performed.

Color diagnostic analysis program

color_program

Color calculation results can be plotted on various chromaticity diagrams, and pass / fail judgments can be made.

MSV-5500 / 5700/5800

Model name
MSV-5500 MSV-5700 MSV-5800
 

Spectrometer section

 

Zellny Turner Mount Single Monochromator Double Beam Method

 

light source

 

30 W Deuterium Lamp, 20 W Halogen Lamp
Option: 150 W Xe Light Source (Air Cooled)

 

Measurement wavelength range

 

200-900 nm

 

200-2700 nm

 

200-1600 nm

 

Detector

 

Photomultiplier tube

 

Photomultiplier tube,
cooling type PbS photoconducting element

 

Photomultiplier tube,
cooled InGaAs photodiode

 

Measurement method

 

Transmission measurement / reflection measurement

 

Observation

 

High resolution built-in CMOS camera (3 million pixels), with optical zoom, built-in ATOS mechanism, LED lighting

 

Objective mirror

 

Cassegrain objective mirror Electric 4-hole revolver switching 10x, 16x, 32x selection

 

Condensing mirror

 

Cassegrain condensing mirror Manual replacement method 10x, 16x, 32x selection, with condensing mirror position automatic adjustment function

 

Sample stage

 

Manual stage, automatic XYZ stage (optional), joystick (optional)

 

software

 

JASCO Spectrum Manager

 

Supported OS

 

Windows 10 Pro (64-bit)

 

Standard program

 

Microscopic spectrum measurement, microscopic fixed wavelength measurement, microscopic time change measurement, validation, spectrum analysis, microscopic imaging analysis, Jasco Canvas (printing tool)

 

Automatic XYZ stage control (when installed)

 

 

Stage movement, area mapping, line measurement, multipoint measurement, fixed wavelength mapping measurement, autofocus, multi-image acquisition

 

Dimensions / weight

740 (W) x 745 (D) x 630 (H) mm Approx. 111 kg
 

Power requirement

 

AC100 V 50/60 Hz 340 VA

Transmission measurement of Volvox by using MSV-5000 series

Thickness Analysis of natural oxide film on microscopic Si pattern

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